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1 article(s) from Chawla, Vipin

Modeling and optimization of atomic layer deposition processes on vertically aligned carbon nanotubes

Nuri Yazdani,
Vipin Chawla,
Eve Edwards,
Vanessa Wood,
Hyung Gyu Park and
Ivo Utke

Beilstein J. Nanotechnol. 2014, 5, 234–244, doi:10.3762/bjnano.5.25

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Figure 1: Illustration of one ALD cycle on a VACNT array. Upon exposure to the precursor gas (a: bulk gas dif...

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Figure 2: Flow chart of the precursor exposure/adsorption simulation for one ALD cycle.

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Figure 3: Results of the precursor adsorption kinetics simulation while using the parameters defined in Table 1. The...

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Figure 4: Comparison of the simplified model (Equation 18) and the simulation of the full diffusion model (solid line) w...

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Figure 5: Plot of deposited oxide thickness with respect to the VACNT depth for a multi-cycle ALD process, de...

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Figure 6: Experimental results for TiO₂ coated VACNTs. (a) An SEM image of a VACNT array coated with 400 cycl...

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Published 05 Mar 2014

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